- Leading Edge Semiconductor Wafer Surface Cleaning Technologies 90nm timeframe.pdf (4.9M)
- Innovations in Supercritical Fluid Technology.pdf (15M)
- 2014-02-28 Wafer Cleaning Using Supercritical CO2.pdf (2.3M)
- 2014-02-28 Supercritical CO2 The Next Generation Solvent.pdf (1.7M)
- 2014-02-28 Green Industrial Cleaning Solution – Supercritical CO2.pdf (894K)
- 2014-02-19 Challenges and Trends in Semiconductor Fabrication by Lerner.pdf (1.7M)
- 2014-02-06 High Pressure Supercritical Fluid Chambers.pdf (670K)
- 2014-01-29 Compilation of Previous Supercritical CO2 Discussions.pdf (131K)
- 2007-08-15 Draft Report on Water Discussions.pdf (17K)
- 2007-04-25 Water Dossier.pdf (1M)
- 2006-10-18 EPA List of Drinking Water Contaminants and MCLs.pdf (2.1M)
- 2005-12-06 NMED Ground Water Quality in Corrales.pdf (3M)
- 2005-12 Corrales Domestic Well Sampling.pdf (970K)
- 2004-07-12 BOC Edwards & IMEC Joint Program on Supercritical CO2.pdf (993K)
- 2004-02-17 Utilization of Supercritical Fluids in Processing Semiconductors.pdf (2.1M)
- 2003-08-22 Supercritical CO2 Tools and Applications.pdf (11.7M)
- 2001-05 Comparison of Wet Manual Cleaning Processes to CO2 part 2.pdf (216K)
- 2001-05 Comparison of Wet Manual Cleaning Processes to CO2 part 1.pdf (1M)
- 2001-03-01 Final Report Cleaning with Liquid / Supercritical CO2.pdf (178K)
- 2000-06 Historical and Current Water Use in the Middle Rio Grande.pdf (678K)
CEWG 